Piezo motors are known for their extremely small size and high size-to-torque ratio, as well as high-resolution movements (micrometer and even nanometer-level resolution.) The high resolution is attributable to the inherent design of piezo motors themselves, but feedback also helps to ensure highly accurate movement on the order of nanometers.
Incremental linear encoders, such as the LIP 481 from Heidenhain (left), are often used for position feedback with digital motion controllers in piezo motor positioning stages. (Image via Heidenhain) An example of a linear motor positioning stage (right) equipped with digital position feedback. (Image via PI)
作为一般规则，压电电机可以操作打开环路或闭环。闭环操作的优点是它提供更高的精度和更高的可重复性和线性。闭环反馈还有助于消除漂移和滞后，这两个因素都会产生负面和准确性。
There are a few common types of feedback used with piezo motors ranging from strain gauges to optical encoders, depending on the application requirements:
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- Optical encoders: Incremental optical encoders are commonly used for piezo motor feedback. However, absolute encoders can be used as well, although they are typically more costly than incremental encoders.
- 电容式传感器：除了应变仪表传感器外，这些是最常见的，因为它们相对便宜，紧凑，提供了良好的质量纳米分辨率读数。
- 激光干涉仪：这些提供子纳米分辨率，但它们也比基于电容的传感器或编码器更容易且昂贵。
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Filed Under:运动控制提示,Encoders • linear,编码器•光学
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