Etel非常自豪地宣布，从7月8日至10日，在加利福尼亚州旧金山的Semicon West发布其新的安静 - 主动隔离系统（Booth＃1217）。从现在开始，埃特尔的高级运动平台不仅包括运动系统及其相关的运动控制器，而且还可以从其专有的主动隔离系统中受益。这使Etel成为唯一的运动系统供应商设计和提供完整的解决方案！
QuiET is a 6 Degrees Of Freedom (DOF) module cancelling both stage-born and ground-born vibrations resulting in:
- 由于移动和定居时间较短，更高的吞吐量
- Higher process stability thanks to lower jitter and better position stability at motion stage level
- Lower cost of ownership thanks to a single supplier for the complete advanced motion platform
Vibrations in the machine?
High-end applications in the semiconductor industry always require tighter performances in terms of position stability, vertical jitter, move and settle times and tracking error, to name but a few. Complex machine equipment is, in one way or another, connected to the granite of the motion platform. As such, any vibration at the granite level translates into inaccuracies and longer settle times at the process tool level. Thanks to ETELs solution, getting rid of those vibrations has never been so efficient.
将运动性能推向新的水平！
Enhancing the synergies between its proprietary state-of-the-art components including motors, encoders, bearings, controllers, cable solutions and precision mechanics, ETEL was able to design a high performance active damping solution. Through a homogeneous, fully-digital and deterministic motion control architecture, acceleration feed forward accuracy has been brought to outstanding levels: higher than 99%! This makes move and settle times and residual vibration levels shrink to unprecedented values, which directly brings stability to the customers process.
Modular, scalable, and compatible with any footprint!
安静的系列被设计为高度模块化和可扩展性。得益于预选的主动组件列表，埃尔特（Etel）可以很快找到优化的解决方案来满足客户的需求。弹簧元素，洛伦兹执行器和专有传感器嵌入在基于三明治的建筑中，然后进行定制以满足特定的足迹要求。
埃特尔承担整体绩效的全部责任
安静的系列正在推动埃特（Etel）的前锋集成策略进一步。当将安静的模块用作高级运动平台的一部分时，Etel成为与性能有关的所有事物的唯一接触点：消除需要协调不同供应商之间的需求，确保对通信渠道进行优化，并允许更轻松的服务和调试。
Filed Under:运动控制技巧
